Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: A Simulation Study
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2006
ISSN: 1057-7157
DOI: 10.1109/jmems.2006.880198